Articles tagged "Xe milling"

The 16th European Microscopy Congress 2016
Ultrafast nano-fabrication and analysis using Xe plasma-FIB-SEM microscope and its applications for Cu milling using the Rocking-stage
Abdelmalek Benkouider (1), Sharang Sharang (2), Tomaš Hrnčíř (1), Jozef Vincenc Oboňa (2), Jaroslav Jiruše (1), Edward Principe (3)
1. R&D Physics, Tescan Orsay Holding, Brno, République tchèque 2. R&D Application, Tescan Orsay Holding, Brno, République tchèque 3. R&D Application, Tescan USA, Warrendale, Etats-Unis
Conventional Ga FIB has a reasonable resolution (typically up to 2.5 nm). However, these instruments present some limitations, including Ga ion implantation and contamination, and…