Official abstracts site for the European Microscopy Congress
The 16th European Microscopy Congress 2016
Yang Qiu (1, 2), Hugo Bender (1), Els Van Besien (3), Min-Soo Kim (4), Olivier Richard (5), Wilfried Vandervorst (1, 6)
1. MCA, imec, Leuven, Belgique 2. Materials Characterization and Preparation Center, South University of Science and Technology of China, Shenzhen, Chine 3. Thin Films, imec, Leuven, Belgique 4. FEOL Process Integration, imec, Leuven, Belgique 5. MCASA, imec, Leuven, Belgique 6. IKS, KU Leuven, Leuven, Belgique