Articles tagged "detection system"

The 16th European Microscopy Congress 2016
Surface-sensitive investigation of semiconductor devices with a signal-selective SEM detection system
Jaroslav Jiruše (1), Jolana Kološová (1), Petr Mareš (1), Rostislav Váňa (2)
1. R&D Physics, TESCAN Brno, Brno, République tchèque 2. R&D Applications, TESCAN Brno, Brno, République tchèque
The detection system of a scanning electron microscope (SEM) is just as important for image quality as the design of its electron optics [1]. Recent…