The 16th European Microscopy Congress 2016
Depth Resolution and Surface Sensitivity with the Multiple Detection System of a HR-SEM
1. Center for Electron Microscopy (ZELMI), Technische Universität Berlin, Berlin, Allemagne
State-of-the-art high-resolution scanning electron microscopes (HR-SEMs) attain a lateral resolution of about 1 nm. To obtain this high resolution even at low landing energies, a…
Official abstracts site for the European Microscopy Congress