The 16th European Microscopy Congress 2016
Quantitative and non-destructive defect metrology for beyond Si semiconductors
1. FEI Czech Republic, Brno, République tchèque 2. IMEC, Leuven, Belgique
Electron channeling contrast imaging (ECCI) is a powerful scanning electron microscopy (SEM) technique for the visualization and analysis of crystalline defects like dislocations and stacking…
Official abstracts site for the European Microscopy Congress