The 16th European Microscopy Congress 2016
Combining Current Imaging and Electrical Probing for fast and reliable in situ Electrical Fault Isolation
1. Kleindiek Nanotechnik, Reutlingen, Allemagne
Within the last decades, the feature widths of semiconductor devices have become too small to be resolved by state-of the art optical microscopes, and other…
Official abstracts site for the European Microscopy Congress