The 16th European Microscopy Congress 2016
Protecting copper TEM specimens against corrosion via e-beam induced carbon deposition
1. MCA, imec, Leuven, Belgique 2. IKS, Dept. Physics, KULeuven, Leuven, Belgique
Copper containing Transmission Electron Microscopy (TEM) specimens are vulnerable to corrosion during transfer from Focused Ion Beam (FIB) to TEM vacuum. The corrosion is an…
Official abstracts site for the European Microscopy Congress