Articles tagged "correlative SEM"

The 16th European Microscopy Congress 2016
Correlative ECCI and CL of single GaN microstructures obtained using ECP by beam rocking on small areas
Johannes Ledig (1), Frederik Steib (1), Jana Hartmann (1), Sönke Fündling (1), Hergo-Heinrich Wehmann (1), Andreas Waag (1)
1. Institute of Semiconductor Technology and Laboratory for Emerging Nanometrology, TU Braunschweig, Braunschweig, Allemagne
SEM can be used to characterize the crystal structure at smooth surfaces, e.g. by mapping of electron channeling pattern (ECP). Layers of GaN grown on…