The 16th European Microscopy Congress 2016
Where does the FIB sputtered matter accumulate in the SEM chamber ?
Scanning electron microscopes (SEM) equipped with focused ion beam (FIB) column are nowadays dual platform instruments commonly used in various micro sample preparation processes. While…The 16th European Microscopy Congress 2016
Low energy electron beam induced cleaning of graphene layers in SEMs
In order to examine mutually overlapped flakes of two-dimensional crystals such as graphene with an electron microscope we need to obtain a contrast contribution from…