The 16th European Microscopy Congress 2016
Nico Klingner (1), Gregor Hlawacek (1), Rene Heller (1), Johannes von Borany (1), Stefan Facsko (1)
Helium Ion Microscopy (HIM) (Hlawacek et al., 2014) is well known for its high resolution imaging and nano fabrication capabilities. However, in terms of analytic…