The 16th European Microscopy Congress 2016
An in-situ Low Energy Argon Ion Source for Local Surface Modification
1. Application Development, FEI , Eindhoven, Pays-Bas 2. R&D, FEI , eindhoven, Pays-Bas
A new in-situ low energy ion source for SEM and DualBeam has been designed. The static beam of low energy gaseous ions such as Ar+,…
Official abstracts site for the European Microscopy Congress