Articles tagged "annular aperture"

The 16th European Microscopy Congress 2016
Development of a new electrostatic Cs-corrector consisted of annular and circular electrodes
Tadahiro Kawasaki (1, 2, 3), Takafumi Ishida (2, 3), Masahiro Tomita (4), Tetsuji Kodama (5), Takaomi Matsutani (6), Takashi Ikuta (7)
1. Nanostructures research laboratory, Japan Fine Ceramics Center, Nagoya, Japon 2. Institute of materials and systems for sustainability, Nagoya University, Nagoya, Japon 3. GREEN; Global Research Center for Environment & Energy based on Nanomaterials Science, Satellite at Nagoya University, Tsukuba, Japon 4. Vacuum Device, Vacuum Device Ltd., Mito, Japon 5. Graduate school of science and technology, Meijo University, Nagoya, Japon 6. Faculty of science and engineering, Kinki University, Higashiosaka, Japon 7. Faculty of engineering, Osaka Electro-communication University, Neyagawa, Japon
For improving spatial resolution in electron microscopy, as is well known, the spherical aberration (Cs) has to be compensated. Currently, the Cs-correction devices consisted of…