Articles tagged "angular emission distribution"

The 16th European Microscopy Congress 2016
Where does the FIB sputtered matter accumulate in the SEM chamber ?
Emmanuel CADEL (1), Fabien CUVILLY (1), Charly VAUDOLON (1), Auriane ETIENNE (1)
1. Groupe de Physique des Matériaux UMR CNRS 6634, Université de Rouen Normandie, Saint Etienne du Rouvray, France
Scanning electron microscopes (SEM) equipped with focused ion beam (FIB) column are nowadays dual platform instruments commonly used in various micro sample preparation processes. While…