The 16th European Microscopy Congress 2016
Phase formation and growth behavior of Co-Ge thin films
1. IM2NP, Aix Marseille Université, Marseille, France 2. IM2NP, CNRS, Marseille, France
The potential use of germanide thin films as self-aligned metallization in Ge-based Complementary Metal-Oxide Semiconductor (CMOS) technology has drawn interest in the solid-state…
Official abstracts site for the European Microscopy Congress