Articles tagged "ALD"

The 16th European Microscopy Congress 2016
Quasi-Nanofluidic liquid cell for in situ liquid Trasmission Electron Microscopy
Simone Lagana (1), Esben Kirk Mikkelsen (1), Hongyu Sun (1), Rodolphe Marie (1), Kristian Mølhave (1)
1. DTU Nanotech, Department of Micro-Nanotechnology, Danmarks Tekniske Universitet, Kgs. Lungby, Danemark
In this work we present a new microfabricated nanochannel device for in situ liquid TEM based on wafer bonding (Fig.1a). A schematic depiction of the…